Aug 17, 2018  
2017-2018 Graduate Bulletin 
    
2017-2018 Graduate Bulletin

PHY 5860 - Physical Principles of Electron Microscopy (4)


When Offered: Fall
This course provides an overview of the fundamental principles,instrumentation, and methods of scanning electron microscopy, including all electron optical components (electron sources and guns, electron lenses, deflectors, and stigmators) and complete electron optical system physics. This overview is complemented by a thorough investigation of the electron beam-solid interaction physics and the resulting measurable signals. Image formation physics and a wide range of applications including qualitative and quantitative analysis techniques are fully developed in this course.
Lecture three hours, laboratory three hours. [Dual-listed with PHY 4860.]